Development of characterization methods for parameters of SiC substrates as well as SiC/other material interfaces and their application for investigations carried out in the PBZ program.
Institution: Institute of Electron Technology
Leader: prof. dr hab. Henryk Przewłocki
Contribution to the project:
- characterisation methods for parameters of SiC substrates and the interface layers between the SiC substrates and different layers deposited on them,
- characterisation of processed SiC substrates before and after technology processes carried out in others PBZ projects.