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Development of characterization methods for parameters of SiC substrates as well as SiC/other material interfaces and their application for investigations carried out in the PBZ program.

Institution: Institute of Electron Technology

Leader: prof. dr hab. Henryk Przewłocki

Contribution to the project:
  • characterisation methods for parameters of SiC substrates and the interface layers between the SiC substrates and different layers deposited on them,

  • characterisation of processed SiC substrates before and after technology processes carried out in others PBZ projects.

Department of Semiconductor and Optoelectronics Devices