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Ion implantation method for silicon carbide doping.

Institution: M. Skłodowska-Curie University, Lublin

Leader: prof. dr hab. Jerzy Żuk

Contribution to the project:
  • technology of acceptor and donor doping of SiC substrates using UNIMAS implantation set-up located in Institute of Physics at UMCS.

Department of Semiconductor and Optoelectronics Devices